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References
General References
BNC Staff Presentations - Internal Resources
Purdue's JBX-8100FS, from JEOL - Internal Resources
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JBX-8100FS Performance Test Report - Purdue Training for JBX-8100FS - Purdue STACIS III Anti-vibration Platform for JBX-8100FS IOC report - Purdue |
JEOL Manuals - Internal Resources
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General References
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JEOL JEOL USA Semiconductor Equipment Documents - Electron Beam Lithography Georgia Tech 100 kV Electron Beam Lithography System: JBX-9300FS "JEOL JBX-9300FS Electron Beam Lithography System Training", Georgia Tech Yale YINQE EBL - Manuals and Documentation YINQE EBL - Software Downloads YINQE EBL - Electron-Beam Lithography Training University of Washington Cornell Shot Pitch and Write Time Calculator - XLS University of Michigan University of Minnesota Vistec EBPG5000 (with good process resources) Electron Properties |
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Contact Justin Wirth if you are interested in partnering with BNC to evaluate these resists and develop standard processes of broad usefulness to the BNC research community. AR-P 6200 and AR-N 7520 are of particular interest: AR-P 6200: |
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