Versions Compared

Old Version 42

changes.mady.by.user Hosler, Richard S

Saved on

compared with

New Version Current

changes.mady.by.user Hosler, Richard S

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Page Properties
idFunctionality

Insert excerpt
Problem Reporting Guide
Problem Reporting Guide
nopaneltrue


StatusDOWNMAINT
Issue Date and Description

Facility CDA is down, which takes burn boxes down. 

Estimated Fix Date and CommentTBD 10am  - Cleanroom maintenance next to furnace
Responding StaffR. Hosler


Insert excerpt
e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
nopaneltrue

Image RemovedProtemp Horizontal Furnace - Tube 06 - Polysilicon Deposition

iLab Name: C - Tube 06 Polysilicon
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)


Table of Content Zone
locationtop
styledisc

Table of Contents
outlinetrue
indent25px
stylenone


Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 06 - Polysilicon

Process Temperatures:

  • Tube 06 - 650°C maximum
Technology Overview 


Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References

Widget Connector
urlhttp://youtube.com/watch?v=6RNKkDN_fUY
 - CVD