Versions Compared

Old Version 68

changes.mady.by.user Hosler, Richard S

Saved on

compared with

New Version Current

changes.mady.by.user Hosler, Richard S

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Page Properties
idFunctionality

Insert excerpt
Problem Reporting Guide
Problem Reporting Guide
nopaneltrue


StatusDOWNMAINT
Issue Date and Description

BB Maint. 

Estimated Fix Date and Comment  10am  - Cleanroom maintenance next to furnace
Responding StaffR. Hosler


Insert excerpt
e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
nopaneltrue

Image RemovedProtemp Horizontal Furnace - Tube 06 - Polysilicon Deposition

iLab Name: C - Tube 06 Polysilicon
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)


Table of Content Zone
locationtop
styledisc

Table of Contents
outlinetrue
indent25px
stylenone


Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 06 - Polysilicon

Process Temperatures:

  • Tube 06 - 650°C maximum

Technology Overview 

Sample Requirements and Preparation


Standard Operating Procedure

Widget Connector
urlhttp://youtube.com/watch?v=6RNKkDN_fUY
 - CVD

Questions & Troubleshooting

Process Library

References