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Hydrogen will be unavailable on this tube from 12/22/2018 to 1/2/2019 due to shutdown of the TGMS over recess. | Estimated Resolution Timeframe | |
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Protemp Horizontal Furnace - Tube 01 - RCA Clean Oxidation
iLab Name: C - Tube 01 Clean Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm
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Overview
General Description
Horizontal furnaces for a variety of processes.
Specifications
Process Capabilities:
- Tube 01 - Wet / Dry Oxidation (Super-Clean Si users only)
Process Temperatures:
- Tube 01 - 1100°C maximum
All furnace tubes are capable of samples up to 6 inches in diameter.
Technology Overview
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting| Widget Connector |
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Process Library
References
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