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Problem Reporting Guide
Problem Reporting Guide
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Issue Date and Description


Estimated Fix Date and Comment


Responding Staff


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e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
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Image RemovedProtemp Horizontal Furnace - Tube 03 - Low Temperature Oxide Deposition

iLab Name: C - Tube 03 LTO Dep
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)



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Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 03 - Low Temperature Oxidation (deposition)

Process Temperatures:

  • Tube 03 - 400°C maximum

Technology Overview 

Sample Requirements and Preparation

Standard Operating Procedure

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urlhttp://youtube.com/watch?v=6RNKkDN_fUY
 - CVD

Questions & Troubleshooting

Process Library

References