Status	DOWN
Issue Date and Description	Decommissioning
Estimated Fix Date and Comment	ETA Feb 2026
Responding Staff	R. Hosler

THIS TUBE IS CURRENTLY NOT IN OPERATION WHILE THE EXPERTECH FURNACES THAT WILL REPLACE THEM ARE BEING INSTALLED.

ESTIMATED INSTALLATION READYNESS IS OCTOBER 2025.

Protemp Horizontal Furnace - Tube 03 - Low Temperature Oxide Deposition

iLab Name: C - Tube 03 LTO Dep
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

Overview

General Description

Horizontal furnaces for a variety of processes.

Process Capabilities:

Process Temperatures:

- CVD