Tube 03 LTO Dep

Owned by Wirth, Justin C
Last updated: May 02, 2024 by Hosler, Richard S
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

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Protemp Horizontal Furnace - Tube 03 - Low Temperature Oxide Deposition

iLab Name: C - Tube 03 LTO Dep
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)


Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 03 - Low Temperature Oxidation (deposition)

Process Temperatures:

  • Tube 03 - 400°C maximum

Standard Operating Procedure

 - CVD