Versions Compared

Old Version 78

changes.mady.by.user Hosler, Richard S

Saved on

compared with

New Version Current

changes.mady.by.user Hosler, Richard S

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Page Properties
idFunctionality

Insert excerpt
Problem Reporting Guide
Problem Reporting Guide
nopaneltrue

StatusDOWNUP
Issue Date and Description

 Quartz Tube Broken


Estimated Fix Date and Comment

 Replacing Tube


Responding StaffR. Hosler


Insert excerpt
e-Log Link - Protemp Horizontal Furnaces
e-Log Link - Protemp Horizontal Furnaces
nopaneltrue

HTML Comment<font size="6">Protemp

Protemp Horizontal Furnace - Tube 03 - Low Temperature Oxide

Deposition</font>

Deposition

iLab Name: C - Tube 03 LTO Dep
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)



Table of Content Zone
locationtop
styledisc

Table of Contents
outlinetrue
indent25px
stylenone


Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 03 - Low Temperature Oxidation (deposition)

Process Temperatures:

  • Tube 03 - 400°C maximum
Technology Overview 

Sample Requirements and Preparation

Standard Operating Procedure

Widget Connector
urlhttp://youtube.com/watch?v=6RNKkDN_fUY
 - CVD

Questions & Troubleshooting

Process Library

References