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Title:	Plasma-Therm Versaline DSE Deep Silicon Etcher
Owner:	Francis R Manfred
Creator:	Ethan Zhang	Oct 10, 2024
Last Changed by:	Ethan Zhang	Oct 10, 2024
Tiny Link: (useful for email)	https://purdue.atlassian.net/wiki/x/LwDMFQ
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Time	Editor
Oct 10, 2024 16:34	Ethan Zhang	View Changes
Oct 10, 2024 15:28	Ethan Zhang	View Changes
Oct 10, 2024 15:23	Ethan Zhang	View Changes
Oct 10, 2024 14:58	Ethan Zhang	View Changes
Oct 10, 2024 14:58	Ethan Zhang

External Links (5)
    mailto:fmanfred@purdue.edu
    https://purdue.ilabsolutions.com/service_centers/4141/equip…
    https://purdue0.sharepoint.com/:f:/s/EVPRP-Birck-S-BirckSta…
    https://purdue.ilabsolutions.com/schedules/541152#/schedule…
    https://purdue.atlassian.net/wiki/x/SoDMFQ

Birck Nanotechnology Center Wiki (2)     Page: Problem Reporting Guide     Page: Plasma-Therm Versaline DSE Deep Silicon Etcher