Title: Axic PECVD  
Owner: Wirth, Justin C
Creator: Wirth, Justin C May 10, 2017
Last Changed by: Hosler, Richard S Nov 18, 2024
Tiny Link: (useful for email) https://purdue.atlassian.net/wiki/x/VAZf
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Birck Nanotechnology Center Wiki (1)
    Page: 2020-12-18 to 2021-01-04: Reduced Holiday Operations
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Time Editor  
Nov 18, 2024 12:01 Hosler, Richard S View Changes
Nov 13, 2024 10:20 Hosler, Richard S View Changes
Nov 04, 2024 08:56 Hosler, Richard S View Changes
Sept 27, 2024 11:10 Hosler, Richard S View Changes
Sept 25, 2024 13:31 Hosler, Richard S  
Outgoing Links
External Links (8)
    https://purdue.ilabsolutions.com/service_centers/4164/equip…
    https://en.wikipedia.org/wiki/Capacitively_coupled_plasma
    www.axic.com/Axic-BENCHMARK-800-II.html
    https://en.wikipedia.org/wiki/Plasma-enhanced_chemical_vapo…
    https://purdue.ilabsolutions.com/equipment/show/301900/?tab…
    mailto:srinehar@purdue.edu
    https://etd.ohiolink.edu/!etd.send_file?accession=ohiou1406…
    mailto:hosler0@purdue.edu
Birck Nanotechnology Center Wiki (4)     Page: Axic PECVD
    Page: e-Log Link - PECVD & Thermal Annealing
    Page: Problem Reporting Guide
    Page: Axic PECVD - Internal Resources