Title: Photoresists  
Owner: Wirth, Justin C
Creator: Wirth, Justin C Mar 02, 2017
Last Changed by: Wirth, Justin C Apr 10, 2024
Tiny Link: (useful for email) https://purdue.atlassian.net/wiki/x/dgpf
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Birck Nanotechnology Center Wiki (3)
    Home page: BNC Wiki Home
    Page: Optical Lithography
    Page: Spin Coating
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    Page: SU-8 Process
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Apr 10, 2024 09:42 Wirth, Justin C View Changes
Nov 05, 2021 10:09 Wirth, Justin C View Changes
Nov 05, 2021 10:03 Wirth, Justin C View Changes
Jun 17, 2021 17:52 Joon Hyeong Park View Changes
Jun 17, 2021 17:11 Joon Hyeong Park  
Outgoing Links
External Links (51)
    https://www.allresist.com/wp-content/uploads/sites/2/2020/0…
    www.microchemicals.com/products/photoresists/az_9260.html
    https://www.allresist.com/wp-content/uploads/sites/2/2016/1…
    https://doi.org/10.1116/1.2799978
    https://www.sciencedirect.com/science/article/pii/S01679317…
    https://en.wikipedia.org/wiki/Hydrogen_silsesquioxane
    https://www.allresist.com/wp-content/uploads/sites/2/2018/0…
    www.allresist.com/process-chemicals-adhesion-promoter-hmds-…
    https://doi.org/10.1116/1.1763897
    www.microchem.com/Prod-PMGI_LOR.htm
    www.cnf.cornell.edu/cnf_process_ebl_resists.html#ZEP
    https://en.wikipedia.org/wiki/Photolithography
    https://www.allresist.com/wp-content/uploads/sites/2/2018/0…
    https://en.wikipedia.org/wiki/Phenol_formaldehyde_resin#Nov…
    https://www.allresist.com/wp-content/uploads/sites/2/2018/0…
    dx.doi.org/10.1116/1.1524971
    www.microchem.com/Tech-TechRefPMMA.htm
    https://en.wikipedia.org/wiki/Propylene_glycol_methyl_ether
    https://www.allresist.com/wp-content/uploads/sites/2/2018/0…
    https://en.wikipedia.org/wiki/Anisole
    https://en.wikipedia.org/wiki/Electron-beam_lithography
    https://avs.scitation.org/doi/10.1116/1.3660788
    https://en.wikipedia.org/wiki/Propylene_glycol_methyl_ether…
    https://en.wikipedia.org/wiki/Poly%28methyl_methacrylate%29
    https://en.wikipedia.org/wiki/Photoacid
    iopscience.iop.org/0268-1242/12/9/017
    nanolithography.gatech.edu/etching/PMMA_ZEP520_resist_compa…
    https://doi.org/10.1063/1.4954493
    henderson.chbe.gatech.edu/Introductions/i-line%20resists.ht…
    https://doi.org/10.1116/1.1524971
    https://en.wikipedia.org/wiki/Diazonaphthoquinone
    https://doi.org/10.1088/0268-1242/31/2/025010
    research.engineering.ucdavis.edu/cnm2/wp-content/uploads/si…
    https://en.wikipedia.org/wiki/Chemistry_of_photolithography
    www.microchemicals.com/products/photoresists/az_1518.html
    https://en.wikipedia.org/wiki/Cyclopentanone
    https://www.allresist.com/wp-content/uploads/sites/2/2018/0…
    www.nanophys.kth.se/nanophys/facilities/nfl/resists/allresi…
    www.allresist.com/process-chemicals-adhesion-promoter-adhes…
    https://pubs.acs.org/doi/10.1021/acs.chemmater.6b03483
    https://refractiveindex.info/?shelf=other&book=pmma_resists…
    https://avs.scitation.org/doi/pdf/10.1116/1.3640794
    www.microchem.com/Prod-PMMA.htm
    https://doi.org/10.1116/1.3002562
    www.microchem.com/pmma_faq.htm
    https://en.wikipedia.org/wiki/Diphenylsilanediol
    https://avs.scitation.org/doi/pdf/10.1116/1.4899239
    https://doi.org/10.1117/3.2265072
    https://arxiv.org/pdf/1611.07266.pdf
    https://en.wikipedia.org/wiki/Photoresist
    https://www.amazon.com/Plastic-Transfer-Pipettes-Gradulated…
Birck Nanotechnology Center Wiki (4)     Page: SU-8 Process
    Page: Published Works - Internal Resources
    Page: Spin Coating
    Page: Photoresists