| Title: | JEOL JBX-8100FS E-Beam Writer | |
|---|---|---|
| Owner: | Wirth, Justin C | |
| Creator: | Wirth, Justin C | Feb 09, 2018 |
| Last Changed by: | Wirth, Justin C | Mar 18, 2025 |
| Tiny Link: (useful for email) | https://purdue.atlassian.net/wiki/x/chVf | |
| Export As: | Word · PDF | |
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Birck Nanotechnology Center Wiki (3)
BNC Wiki Home New Editor SOP Copy - JEOL JBX-8100FS E-Beam Writer SOP - JEOL JBX-8100FS E-Beam Writer |
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External Links (37)
www.allresist.com/wp-content/uploads/sites/2/2016/04/ar_600…
www.allresist.com/category/faqs-e-beam-resists/
https://nau.edu/CEFNS/Labs/Electron-Microprobe/GLG-510-Clas…
https://nano.yale.edu/manuals-documentation
www.techmfg.com/products/stacis/quietisland
www.cnfusers.cornell.edu/cnf5_tool.taf?_function=detail&eq_…
https://purdue.ilabsolutions.com/service_centers/4127/equip…
https://purdue.ilabsolutions.com/schedules/343241#/schedule…
www.allresist.com/evaluation-of-various-developers-for-e-be…
https://nano.yale.edu/book/export/html/213
www.allresist.com/wp-content/uploads/sites/2/2016/12/homepa…
https://www.microchemicals.com/products/photoresists/e_beam…
https://teams.microsoft.com/l/chat/0/0?users=jcwirth@purdue…
www.cnfusers.cornell.edu/cnf5_tool.taf?_function=detail&eq_…
www.cnf.cornell.edu/cnf_process_ebl_alignment.html
www.cnfusers.cornell.edu/doc/ShotPitchAndWriteTimeCalculato…
https://www.jeol.co.jp/en/applications/detail/1698.html
www.microscopy.ethz.ch/properties.htm
https://wiki.itap.purdue.edu/pages/replycomment.action?comm…
https://sums.gatech.edu/articles/2013
www.techmfg.com/products/stacis/stacisiii
https://ebeam.mff.uw.edu/ebeamweb/doc/jobfiles/jobfiles/sch…
https://nano.yale.edu/software-downloads
https://ebeam.mff.uw.edu/ebeamweb/ref/calculators/rte/RunTi…
apps.mnc.umn.edu/archive/ebpgwiki/
mailto:wrowe@purdue.edu
lnf-wiki.eecs.umich.edu/wiki/JEOL_JBX-6300FS_Electron_Beam_…
www.ou.edu/research/electron/bmz5364/calc-kv.html
https://purdue0.sharepoint.com/:f:/s/EVPRP-Birck-S-BirckSta…
https://docs.google.com/forms/d/e/1FAIpQLScseloN8sGa4y370ZE…
iopscience.iop.org/article/10.1143/JJAP.43.3767
mailto:jcwirth@purdue.edu
www.allresist.com/csar-62-nanostructures-written-at-100-kv/
https://purdue.atlassian.net/wiki/download/attachments/6231…
dx.doi.org/10.1016/j.mee.2016.02.003
nanolithography.gatech.edu/JEOL_JBX-9300FS_Training.pdf
https://www.jeolusa.com/RESOURCES/Photomask-Direct-Write-Li…
www.allresist.com/wp-content/uploads/sites/2/2016/04/ar_600…www.allresist.com/category/faqs-e-beam-resists/https://nau.edu/CEFNS/Labs/Electron-Microprobe/GLG-510-Clas…https://nano.yale.edu/manuals-documentationwww.techmfg.com/products/stacis/quietislandwww.cnfusers.cornell.edu/cnf5_tool.taf?_function=detail&eq_…https://purdue.ilabsolutions.com/service_centers/4127/equip…https://purdue.ilabsolutions.com/schedules/343241#/schedule…www.allresist.com/evaluation-of-various-developers-for-e-be…https://nano.yale.edu/book/export/html/213www.allresist.com/wp-content/uploads/sites/2/2016/12/homepa…https://www.microchemicals.com/products/photoresists/e_beam…https://teams.microsoft.com/l/chat/0/0?users=jcwirth@purdue…www.cnfusers.cornell.edu/cnf5_tool.taf?_function=detail&eq_…www.cnf.cornell.edu/cnf_process_ebl_alignment.htmlwww.cnfusers.cornell.edu/doc/ShotPitchAndWriteTimeCalculato…https://www.jeol.co.jp/en/applications/detail/1698.htmlwww.microscopy.ethz.ch/properties.htmhttps://wiki.itap.purdue.edu/pages/replycomment.action?comm…https://sums.gatech.edu/articles/2013www.techmfg.com/products/stacis/stacisiiihttps://ebeam.mff.uw.edu/ebeamweb/doc/jobfiles/jobfiles/sch…https://nano.yale.edu/software-downloadshttps://ebeam.mff.uw.edu/ebeamweb/ref/calculators/rte/RunTi…apps.mnc.umn.edu/archive/ebpgwiki/mailto:wrowe@purdue.edulnf-wiki.eecs.umich.edu/wiki/JEOL_JBX-6300FS_Electron_Beam_…www.ou.edu/research/electron/bmz5364/calc-kv.htmlhttps://purdue0.sharepoint.com/:f:/s/EVPRP-Birck-S-BirckSta…https://docs.google.com/forms/d/e/1FAIpQLScseloN8sGa4y370ZE…iopscience.iop.org/article/10.1143/JJAP.43.3767mailto:jcwirth@purdue.eduwww.allresist.com/csar-62-nanostructures-written-at-100-kv/https://purdue.atlassian.net/wiki/download/attachments/6231…dx.doi.org/10.1016/j.mee.2016.02.003nanolithography.gatech.edu/JEOL_JBX-9300FS_Training.pdfhttps://www.jeolusa.com/RESOURCES/Photomask-Direct-Write-Li…