Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
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Protemp Horizontal Furnace - Tube 04 - Field Oxide Growth

iLab Name: C - Tube 04 Field Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

This tube has a damaged from heating zone. Tests were performed to determine if this is causing lower rates. (oct_23_ox_check.xlsx)

Dry oxide rate was determined to be 7% lower than target on the default 200nm recipe.

Wet oxide rate was determined to be 36% lower than target on the default 1000nm recipe.

The tube is still functional and usable, just bear the above in mind with recipe lengths.

Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

Tube 04 - Wet / Dry Oxidation (For general use)

Process Temperatures:

Tube 04 - 1100°C maximum

Standard Operating Procedure

- Thermal Oxidation