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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusDOWN
Issue Date and Description

  Front zone low temperature

Estimated Fix Date and Comment

Cooling furnace, will investigate cause tuesday.

Responding StaffR. Hosler

iLab Furnace Kiosk

Create Furnace Log 


View Furnace Log 

Report a Problem

Protemp Process Data

View MSDS Documents


iLab Name: C - Tube 04 Field Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)


Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 04 - Wet / Dry Oxidation (For general use)

Process Temperatures:

  • Tube 04 - 1100°C maximum

Technology Overview 


Sample Requirements and Preparation


Standard Operating Procedure

 - Thermal Oxidation


Questions & Troubleshooting



Process Library

References


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