Spinner 1: Acetone Soluble
Novolak Based
AZ 1500
AZ 5200
AZ 9200
Shipley 1800
SPR 220
ma-N 2400
Acrylic
PMMA (495, 950, Complymers)
Adhesion Promoters
SurPass 4000
Solvents
Acetone
Methanol
IPA
DI H20
PGMEA (AZ EBR Solvent, Microposit Thinner P)
NOT
HMDS
Toluene
NMP
Requirements:
A) Complete removed in acetone if dried.
B) Will not polymerize in contact with acetone, PGMEA, or H20.
C) No vapors which harden resist (NMP, Ammonia, HMDS, Toluene?, Chlorobenzene?) or dope substrates.
Spinner 3: EBL (foil required)
EBL Resists:
HSQ/XR-1541/FOX
ZEP-520
PMMA
maN 2400
Conductive Polymers:
Aquasave 57xs
Adhesion Promoters:
MAMA(8.5)MAA EL 11
Spinner 4: Epoxy and Plastics/Unregulated (foil required)
Epoxy:
Su-8 (gamma-Butyrolactone (GBL)/Thinner/OmniCoat (PGME/Cyclopentanone)
Plastics
Polyimide (NMP removes, slightly soluble in acetone, but clumps vacuum lines of used with acetone)
Polystyrene (soluble in aromatic hydrocarbons)
Poly(vinyl alcohol) (water soluble, gels in acetone
Poly(ethyleneimine) (acetone insoluble, but removed in methanol)
Adhesion promoters
Silgard A-174 (OSAP for Parylene)
Ormoprime 08 (OSAP for NIL Ormo hybrid polymers, removed in pianha or plasma)
Hd Microsystems vm652 (Organo silane for polyimide)
3-mercaptopropyl trimethoxysilane (Au to Oxide)
Misc (Polar Soluble)
Polypropylene carbonate (Acetone Soluble)
Graphite oxide (may be okay)
Misc (Non-polar soluble)
Alq3
Pelc conductive silver paint
PST toluene
Spin on teflon
Coronene in toluene
LOR/PGMI (Cyclopentanone/PGME)
LOR:
3A
3B
5A
30B
PGMI SF 8
Etch Protectants/Waxes
Protek A2-22
Epotek OE132-43 8oz (Polyimide)
Protek PSB, PS, B2 (PGMEA based)
Protek B3 Primer, B2 Primer (PGME)
TBD:
HMDS Spinner formulations
MCC Primer 80/20
P20
Undiluted silanes:
HMDS
AP
Ti prime
Nanoparticles
Liquid diamond monocrystalline (microdiamant)
Spin on dopants
P509 spin on dopant
B155 spin on dopant
Unknown
NIL Resists
Nxr3032
Ormolayer stamp
Nxr 3020
Ormoprime 08
?
Bv
Not permitted uncured in Cleanroom:
Silicone
PDMS (Sylgard 182, 184)