For getting photomasks made outside the facility, users have reported using these services. Please add or comment with suppliers you have had success with, as well as the cost, size, material, minimum feature size, and turn around time.
Many users have had success with UIUC for their photomasks. The system is an older TRE tool, making the prices very reasonable. Rectangular patterns with larger than 3 um critical dimensions should see good results from these.
- UIUC: https://mrl.illinois.edu/facilities/mask-fabrication-services
Pricing: $200 for Chrome (4"x4", 5"x5"), $210 (4"x4"), $220 (5"x5") for Iron Oxide. (including USPS priority shipping)
Commercial suppliers
- TOPPAN Photomask: https://www.photomask.com/
Pricing: ~$500 for Chrome and $700 for Iron Oxide. - Frontrange Photomask: https://frontrange-photomask.com/
- Advance Reproductions: http://advancerepro.com/
- 5 day turn around
- ~$500 base price for 5 inch Chrome, extra $100 for 2 um, extra $100 for Iron Oxide.
- Benchmark Technologies: http://www.benchmarktech.com/photomasks
- Applied Image: https://www.appliedimage.com/products/photomask-semiconductor-services
- Past users have reported: Pricing was ~$550 dollars for chrome, took a lot of back and forth to get 4 um features, quote 1 week lead time.
Transparency Photomasks
Cleanroom compatible transparency photomasks may be purchased from Output City: https://www.outputcity.com/
Examples of these masks are available in the cleanroom. Use of these masks require some additional steps due to the flexible material, contact Joon Park for more information.