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Status	INACTIVE
Issue Date and Description
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Responding Staff

iLab Name: Hall Effect MMR
iLab Kiosk: BRK Characterization Core
FIC: Tim Sands
Owner: Nithin Raghunathan
Location: BRK 1217
Maximum Wafer Size:

Overview

General Description

Hall effect system for measuring resistivity, mobility, carrier concentration and dopant type of a wide range of samples using the Van der Pauw method.

Specifications

Sample size 14mm x 10mm maximum
Temperature range 80K-400K
Magnetic field 3300G maximum

System components:

H-50 Hall, Van der Pauw controller
MPS-50 programmable power supply
K-20 temperature controller

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting