iLab Name: Cleanroom Probe 1
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: Cleanroom - Q Bay
Maximum Wafer Size: 4"/100 mm
Overview
General Description
Probe Station III consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an HP4156A Semiconductor Parameter Analyzer.
Specifications
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References