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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Probe 2
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: 2100- J (J-bay)
Maximum Wafer Size: 4"/100 mm

Overview

General Description

An Everbeing EB-6 high precision probe station is available for DC wafer probing. There is a Tektronix 4200-SCS Semiconductor Parameter Analyzer for both IV and CV measurements to collect the data. Details on the parameter analyzer are available here : https://www.tek.com/keithley-4200a-scs-parameter-analyzer-manual-1 

Features

  • Low profile coaxial-driven style stage (optional large knob precision stage)
  • Back-lash free movement
  • Mounting for 12 micropositioners
  • 4.5” Probe Card Holder compatible
  • Micropositioner Standby Dock
  • Microscope Tilting for E-Z lens switching

Applications

  • Basic IV/CV
  • RF, Single Broadband Probing
  • High Voltage, High Current

Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting




References

EB-6 Data sheet


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