Research Scientist in charge: Alexei Lagoutchev
Overview
tool name | micro-scopy | spectro-scopy | ellipso-metry | scattero-metry | Raman | film properties | BRK |
|---|---|---|---|---|---|---|---|
| Keyence VHX-950F digital microscope | CR-N | ||||||
| CR-J | |||||||
| /wiki/spaces/BNCWiki/pages/6230416 | 1273 | ||||||
| Nikon Eclipse L150 microscope | CR-N | ||||||
| Olympus BX51 metallurgical microscope | CR-P | ||||||
| Olympus BX60 microscope | CR-J | ||||||
| PerkinElmer Lambda 950 UV-VIS-NIR spectrophotometer | 1273 | ||||||
| J.A. Woollam V-VASE UV-VIS-NIR spectroscopic ellipsometer | 1263 | ||||||
| 1263 | |||||||
| Reina FTIR (coming soon) | - | ||||||
| Gaertner ellipsometer L116A | CR-P | ||||||
| ThermoScientific DXR3xi Raman imaging microscope | 1273 | ||||||
| Filmetrics F10-RT | thickness, | CR-P | |||||
| Filmetrics F40-UV | thickness, n, k | CR-P | |||||
| Thin film stress machine | stress | CR-RS | |||||
| Polytec Laser Doppler vibrometer | vibrations | 1089 |
1 - "CR-P" = Scifres Clean Room, Bay P