J.A. Woollam RC2 Spectroscopic Ellipsometer

J.A. Woollam RC2 Spectroscopic Ellipsometer

Status

UP

Issue Date and Description

 

Estimated Fix Date and Comment

 

Responding Staff

 

iLab Name

J.A. Woollam RC2 Spectroscopic Ellipsometer

iLab Kiosk

BRK Metrology Core

FIC

Vladimir Shalaev

Owner

Alexei Lagoutchev

Location

BRK 1263

Max. Wafer

6"/150 mm

Info Links

Internal | Staff

Overview

General Description

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure

Questions & Troubleshooting


 

Process Library