Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name	Polytec Laser Vibrometer
iLab Kiosk	BRK Characterization Core
FIC
Owner	Ryan Wagner
Location	1089A
Max. Wafer
Internal Page
Staff Page

Overview

General Description

A polytec MSA-400 Micro System Analyzer laser doppler vibrometer (LDV). This system measures the vibrational response (i.e. resonance frequencies and mode shapes) of small structures.

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

Polytec Laser Doppler Vibrometer

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