Polytec Laser Doppler Vibrometer
Status | UP |
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iLab Name | Polytec Laser Vibrometer |
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Owner | |
Location | 1089A |
Max. Wafer |
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Overview
General Description
A polytec MSA-400 Micro System Analyzer laser doppler vibrometer (LDV). This system measures the vibrational response (i.e. resonance frequencies and mode shapes) of small structures.
Specifications
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References