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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusDOWN
Issue Date and Description

Pump Maintenance

Estimated Fix Date and Comment

 

Responding StaffR. Hosler

iLab Furnace Kiosk

Create Furnace Log 


View Furnace Log 

Report a Problem

Protemp Process Data

View MSDS Documents



iLab Name: C - Tube 06 Polysilicon
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

Overview


General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 06 - Polysilicon

Process Temperatures:

  • Tube 06 - 650°C maximum

Technology Overview 


Sample Requirements and Preparation


Standard Operating Procedure

 - CVD


Questions & Troubleshooting



Process Library

References


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