Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment	Tube changed 11/11/22
Responding Staff

iLab Furnace Kiosk

Create Furnace Log

View Furnace Log

Report a Problem

Protemp Process Data

View MSDS Documents

iLab Name: C - Tube 03 LTO Dep
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

Tube 03 - Low Temperature Oxidation (deposition)

Process Temperatures:

Tube 03 - 400°C maximum

Technology Overview

Sample Requirements and Preparation

Standard Operating Procedure

- CVD

Questions & Troubleshooting