Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	DOWN
Issue Date and Description	03 Nov 2022 Clean/Replace tube
Estimated Fix Date and Comment	09 Nov 2022
Responding Staff	R. Hosler

iLab Furnace Kiosk

Create Furnace Log

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Report a Problem

Protemp Process Data

View MSDS Documents

iLab Name: C - Tube 03 LTO Dep
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

Tube 03 - Low Temperature Oxidation (deposition)

Process Temperatures:

Tube 03 - 400°C maximum

Technology Overview

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting