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Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusDOWN
Issue Date and Description

 Tube Cleaning & Maintenance

Estimated Fix Date and Comment

 

Responding StaffR. Hosler

iLab Furnace Kiosk

Create Furnace Log 


View Furnace Log 

Report a Problem

Protemp Process Data

View MSDS Documents



iLab Name: C - Tube 01 Clean Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm

Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

  • Tube 01 - Wet / Dry Oxidation (Super-Clean Si users only)

Process Temperatures:

  • Tube 01 - 1100°C maximum

All furnace tubes are capable of samples up to 6 inches in diameter.

Technology Overview 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References


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