Evaporator Sources
Title | Current Sources | Potential Sources |
|---|---|---|
Ti, Al, Pd, Au, Ni, Cr | Ti, Au, Pt, Pd, Al, Ni, Ge, Cr, Ag | |
Ti, Al, Ni, Au, Pt, Ge | Ti, Au, Pt, Al, Ni, Ge, Cr, Ag | |
Ti, Au, Cr, Ni, Al, Pd | Ti, Au, Cr, Pt, Al, Ni, Mo, Pd, Ag, ITO, Al2O3, Ta2O5, SiO2 | |
Ti, Fe, Ni, Al, Ag, Al2O3, SiO2, Cr, Py, Cu, Au, Co, Si, Mn, Ta2O5, Ge, Ni/Cr, Pt, TiO2, Er | ||
Co, Ni, Cu, Pd, Al, Ti | Cu, Ti, Al, Fe, Ni, Co, Sc, Ta, Py, Pd |
Sputterer Sources
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PVD Sputtering System - Flexible Substrate Compatible
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ITO, MgO, W, Ti
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SiO2, TiN, Au, Ti, Ag, Cu, Si3N4, Al, Ni, Si, NbTi, Cr, Ge, Pt, Ni/Ti, Nb, Ta, ITO, MgO, W
...
PVD Sputtering System - 4 Target Magnetic Sources
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Fe (restricted use), Co (restricted use), Ru, Ti
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Ta, Ru, MgO, Cu, W, NiFe, CoFeB, Mo
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PVD Sputtering System - Metal/Dielectric Sources
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Cr, Ti, W3Si4 (restricted), Au
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Si,Cr, Ge, Ag, Cu, Al, Ti, Ta, W, Au, Nb, NbTi, W3Si4, TiO2, Si3N4, SiO2, TiN, MoSi2, Ru
...
PVD Sputtering System - 6 Target Magnetic Sources
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CoFeB, MgO, Ru, Ta, CoCrPt, CoFe
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CoFeB, MgO, Ru, Ta, CoCrPt, CoFe
...
Evaporator Sources
Title | Current Sources | Potential |
...
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Ti, Al, Pd, Au, Ni, Cr
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Ti, Au, Pt, Pd, Al, Ni, Ge, Cr, Ag
...
...
Ti, Al, Ni, Au, Pt, Ge
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Ti, Au, Pt, Al, Ni, Ge, Cr, Ag
...
Lesker E-Beam Evaporator - Flexible Substrate Compatible
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Ti, Au, Cr, Ni, Al, Pd
...
Ti, Au, Cr, Pt, Al, Ni, Mo, Pd, Ag, ITO, Al2O3, Ta2O5, SiO2
...
/wiki/spaces/BNCWiki/pages/6228056
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Ti, Fe, Ni, Al, Ag, Al2O3, SiO2, Cr, Py, Cu, Au, Co, Si, Mn, Ta2O5, Ge, Ni/Cr, Pt, TiO2, Er
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PVD E-Beam Evaporator - Metal/Magnetic Sources
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Co, Ni, Cu, Pd, Al, Ti
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Cu, Ti, Al, Fe, Ni, Co, Sc, Ta, Py, Pd
...
Sources | ||
ITO, MgO, W, Ti | SiO2, TiN, Au, Ti, Ag, Cu, Si3N4, Al, Ni, Si, NbTi, Cr, Ge, Pt, Ni/Ti, Nb, Ta, ITO, MgO, W | |
Fe (restricted use), Co (restricted use), Ru, Ti | Ta, Ru, MgO, Cu, W, NiFe, CoFeB, Mo | |
Cr, Ti, W3Si4 (restricted), Au | Si,Cr, Ge, Ag, Cu, Al, Ti, Ta, W, Au, Nb, NbTi, W3Si4, TiO2, Si3N4, SiO2, TiN, MoSi2, Ru | |
CoFeB, MgO, Ru, Ta, CoCrPt, CoFe | CoFeB, MgO, Ru, Ta, CoCrPt, CoFe |