PVD Sputtering System - Metal/Dielectric Sources

2024-12-20 to 2025-01-02: Reduced Holiday Operations

Dear Birck Research Community,

The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description

10/28/2024 Breaker work delayed, cancel previous plan

Estimated Fix Date and Comment

Responding StaffDave Lubelski/Dan Witter


iLab KioskeLog: SubmiteLog: View/EditReport ProblemMSDS Documents


iLab NameC - PVD Sputtering System - Metal/Dielectric Sources
iLab KioskBRK Evaporation Sputtering Core
FICPeter Bermel
OwnerDave Lubelski
LocationCleanroom - S Bay
Max. Wafer4"/100 mm


Current Sources

Ta2O5, Ti, SiO2, W

Potential SourcesSi,Cr, Ge, Ag, Cu, Al, Ti, Ta, W, Au, Nb, NbTi, W3Si4, TiO2, Si3N4, SiO2, TiN, MoSi2, Ru

Overview

General Description

Metal/dielectric sputtering system

Specifications

DC/RF sputtering capable, 2" targets, base pressure 2x10-6 torr, materials include: Si,Cr, Ge, Ag, Cu, Al, Ti, Ta, W, Au, Nb, WSi4, TiO2, Si3N4, SiO2, water cooled stage

Technology Overview 

No Organics/Polymers Allowed


Sample Requirements and Preparation


Standard Operating Procedure

Note 1: This instrument is billed "per use based on a 2 hour block.

Note 2:  Please observe only 1 user per session.  Your reservation concludes when you vent the system and unload your sample.  

Example: If the usage is 10+ minutes past the 2 hour reservation, you will be billed for 2 uses.



Questions & Troubleshooting



Process Library


References