Status	Down
Issue Date and Description	10/17/2025 Turbo pump will not stay on
Estimated Fix Date and Comment	New turbo pump has arrived and is in the subfab; installation will require coordinating several people and getting vendor input and guidance, and will be planned for during the upcoming fall shutdown
Responding Staff	Dave Lubeski/Dan Witter

iLab Name	C - PVD Sputtering System - 4 Target Magnetic Sources
iLab Kiosk	BRK Evaporation Sputtering Core
FIC	Joerg Appenzeller
Owner	Dave Lubelski
Location	Cleanroom - S Bay
Max. Wafer	4"/100 mm

Current Sources	CoFeB, MgO, Ru, Ta, CoCrPt, CoFe
Potential Sources	CoFeB, MgO, Ru, Ta, CoCrPt, CoFe

Overview

General Description

6 target magnetic sputtering system.

_{No Organics/Polymers Allowed}

Please Note: This instrument is billed per use based on a 2 hour block

Example : 1 user only uses the tool per use. When you vent the system and unload your sample that concludes your reservation .

Example: If the usage is 10+ minutes past the initial 2 hour reservation, you will be billed for 2 uses