Page Information

Title:	Sputtering
Owner:	Wirth, Justin C
Creator:	Wirth, Justin C	May 22, 2018
Last Changed by:	Wirth, Justin C	Sept 12, 2024
Tiny Link: (useful for email)	https://purdue.atlassian.net/wiki/x/Ol5f
Export As:	Word · PDF

Birck Nanotechnology Center Wiki (2)     Page: Deposition     Page: Metallization Sources

Children (5)
    Page: PVD Sputtering System - Nitride
    Page: PVD Sputtering System - Metal/Dielectric Sources
    Page: PVD Sputtering System - 4 Target Magnetic Sources
    Page: PVD Sputtering System - 6 Target Magnetic Sources
    Page: PVD Sputtering System - Flexible Substrate Compatible

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Time	Editor
Sept 12, 2024 09:17	Wirth, Justin C	View Changes
Just adding a single space to see if edits are causing the problem?
Sept 12, 2024 09:06	Wirth, Justin C	View Changes
Reverted from v. 8
Sept 12, 2024 09:05	Wirth, Justin C	View Changes
Sept 12, 2024 09:05	Wirth, Justin C	View Changes
Jul 13, 2022 16:19	Witter, Daniel Joseph

Birck Nanotechnology Center Wiki (1)     Page: e-Log Link - Sputtering System