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Overview

General Description

Acoustic micro imaging system for up to 300mm wafer analysis

Specifications

Scan Area: 350 mm x 350 mm
Z-axis movement: 170 mm
X-axis Motor: 2x linear rod motor
Y-axis Motor: 2x linear rod motor
Z-axis Motor: Servo Motor/Lead Screw
Operating System: Windows 10 and Sonolytics 2
Computer Hardware: Intel i7/SSD-HD
Digitizer: Up to 6 GHz with 12 bits
Image Resolution: Up to 32K by 32K image resolution
Monitors: Dual 28 inch 4k monitors
Tabletop Configuration: Straight and curved
USB: USB 3.0
Counter Weight: Linear Motor driven

Technology Overview - Remove if multiple tools use the same technology/process

 Description of the science behind the process. Include figures and diagrams if applicable.

Sample Requirements and Preparation

Samples that may be used in the tool, materials that are compatible/incompatible, and the required cleaning before the tool may be used. May include both an "ideal" clean and a minimum required clean. Also include BOE/oxide removal, dehydration, or any recommended post process steps.

Standard Operating Procedure

Standard procedure for tool operation, base off established Birck SOPs.

Process Control Information

Process Control Context

Process Control Charts

Questions & Troubleshooting

Question about tool use or process result?
Answer to question.

Process Library

Create process template for tool, allows a user to fill in the details of their process. 

References

Manufacturer brochures, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.