Bruker Optical Profilometer

Owned by Wirth, Justin C
Last updated: Sept 27, 2024 by Richard HarlanVersion comment
5 min read



Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
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iLab Name: Bruker GT-K
iLab Kiosk: BRK Metrology Core
FIC: Shared
Owner: Rich Harlan

Location: Cleanroom - M Bay
Maximum Wafer Size: 6"/150 mm


Overview

General Description

The Contour GT-K is a non-contact, 3 dimensional, optical profiler that uses white light interferometric hardware.  It can be used to profile reflective surfaces and thick transparent films on a reflective surface.

  

Specifications

  • Capable of analyzing samples up 6” (X/Y axis range)
  • 1000Å to 3.5mm vertical measurement range (Z axis range)
  • Equipment sits upon a vibration isolation table.

Optics:

  • 5X Michelson interferometric objective.  Working distance = 6.71mm
  • 10X Mirau interferometric objective.  Working distance = 7.4mm
  • 50X interferometric objective.  Working distance = 3.4mm
  • 0.55X,  1.0X,  and 2.0X Field of View multiplier tubes
  • Magnification ranges from 2.75X to 100X


Standard Operating Procedure

 

1.    SAFETY REQUIREMENTS

1.1        Safety glasses must be worn whenever in the cleanroom, except when using a microscope or when wearing protective goggles.

1.2        Operate the Bruker Profilometer with all protective shields and doors in place.

 

2.    EQUIPMENT 


 

 

Stage Controls 

  1.  The thumbwheel adjusts Z axis height:
    • The button nearby allows for faster travel when activated.
    • Be careful not to crash the objective lens into your sample while focusing 

2.  The joystick moves the XY stage:

    • Left / Right = X axis movement
    • Up / Down =  Y axis movement
    • The button on the top of the joystick allows for faster travel when activated.

 


Loading a Sample

1. Retract the stage out from under the objective using the XY control joystick.

2. Place your sample on the center of the stage.

3. Ensure you have sufficient space beneath the object for your sample. If needed, raise the objective lenses up with Z-Axis height control thumbwheel.

4. Move the stage with your sample to under the objective using the XY control joystick.

Note 1:  Do not crash the sample into the objective.

Note 2:  If an adjustment to the sample is required, move the stage out from beneath the objective.


 

 

Lighting your sample

1. Enable Auto Intensity in the light control window after loading your sample.

2. Know that after you focus on your sample (next step), you will disable Auto Intensity.

3. If parts of your sample appear red in the camera window, the light is oversaturating the collector, and intensity should be decreased. This should happen automatically in Auto mode.


 

 

Focusing on your sample

1. Adjust the Z-Axis height downward towards your sample. Please use extreme care to not crash the objective into your sample.

2. Watch the camera window on the monitor to watch your sample come into focus. At the same time, watch to make sure the objective does not run into your sample.

3. Your sample’s features will eventually come into focus.

4. Continue to move Z-Axis height downward until black and white fringe lines appear on the screen. These are indicators of perfect focus.


 

 

 

Tilting your sample

1. Tilt your sample using the X and Y adjustment knobs to the stage.

Note:  Please do not force the X and Y adjustment knobs. They should be free and easy to move.


2. By tilting the stage, you can “steer” and manipulate the fringe lines. You want to adjust the tilt until:

o The fringe lines are centered on your feature of interest.
o The fringe lines have high contrast with one another.
o The fringe lines are spread wide apart.


Note:  VSI or Thick Film measurement requires 10 or fewer visible fringes
           A VXI or PSI measurement requires 5 or fewer visible fringes.

Hint:  Tilt may be used to bring a 90 degree sidewall into view for measurement, or to scan for slight undercuts

 


 


 

 

 

This is the Standard Operating Procedure:

  

 

This is the user manual for the GT-K from the manufacturer:


 

Here is a chart showing much information regarding the objectives:

 

 

 

NPL's White Light Interferometry Good Practice Guide No.116 (Internal Resource)

Bruker GT-K Standard Operating Procedure (Sean's original)

 


This is the Bruker Control Chart:

               


Questions & Troubleshooting

How do I quickly measure the height of a substrate?

 Follow the instructions here
  1. Login to the tool via iLab
  2. Open up the Vision software, and be aware the SOP is directly next to the Vision icon on the desktop.
  3. Click the "Auto" button under Intensity.
  4. Mask sure the microscope objective is high enough to avoid collision with a sample 
    1. Move the stage out from under the microscope
    2. Load sample
    3. Move stage back under microscope
  5. DO NOT CRASH THE OBJECTIVE: focus on the sample topside.
    1. Find fringes on top side OR do focus like a normal microscope, and then travel up to make Z more negative by 100 um.
  6. Use the stage control to move the edge of the substrate, so that the substrate edge is in the center of the screen.
  7. Under Measurement Setup → More Settings, click Measurement
    1. Set Speed to 7x
    2. Length to 2500 um
    3. Under "Autoscan", click the "Enabled" check box. Set it to End scan 50 um after 80% of data is collected.
    4. If needed, click the "Auto" button under intensity twice to reset intensity so an image is visible. 
    5. Click "Auto" under intensity to deselect it.
    6. Click the "Single Measurement" button.
    7. Wait for the measurement to finish, do not hit the "Finish button".
  8. Under either the X Profile and Y Profile, move the "R" and the "M" to either edge of the step.
  9. Move the sample far out from under the sample
    1. Move the stage out from under the microscope.
    2. Unload sample.
    3. Move stage back under microscope.
  10. Turn off Vision Software.
  11. Disable in iLab.

If the objective appears to be angled away from the stage go into advanced setup (or is it settings) in the top toolbar next to calibration. Go to turrent settings. Initialize the turret.

References