General Description

The Contour GT-K is a non-contact, 3 dimensional, optical profiler that uses white light interferometric hardware.  It can be used to profile reflective surfaces and thick transparent films on a reflective surface.

Specifications

Optics:

1.1        Safety glasses must be worn whenever in the cleanroom, except when using a microscope or when wearing protective goggles.

1.2        Operate the Bruker Profilometer with all protective shields and doors in place.

2.  The joystick moves the XY stage:

1. Retract the stage out from under the objective using the XY control joystick.

2. Place your sample on the center of the stage.

3. Ensure you have sufficient space beneath the object for your sample. If needed, raise the objective lenses up with Z-Axis height control thumbwheel.

4. Move the stage with your sample to under the objective using the XY control joystick.

Note 1:  Do not crash the sample into the objective.

Note 2:  If an adjustment to the sample is required, move the stage out from beneath the objective.

1. Enable Auto Intensity in the light control window after loading your sample.

2. Know that after you focus on your sample (next step), you will disable Auto Intensity.

3. If parts of your sample appear red in the camera window, the light is oversaturating the collector, and intensity should be decreased. This should happen automatically in Auto mode.

1. Adjust the Z-Axis height downward towards your sample. Please use extreme care to not crash the objective into your sample.

2. Watch the camera window on the monitor to watch your sample come into focus. At the same time, watch to make sure the objective does not run into your sample.

3. Your sample’s features will eventually come into focus.

4. Continue to move Z-Axis height downward until black and white fringe lines appear on the screen. These are indicators of perfect focus.

1. Tilt your sample using the X and Y adjustment knobs to the stage.

Note:  Please do not force the X and Y adjustment knobs. They should be free and easy to move.

2. By tilting the stage, you can “steer” and manipulate the fringe lines. You want to adjust the tilt until:

o The fringe lines are centered on your feature of interest.
o The fringe lines have high contrast with one another.
o The fringe lines are spread wide apart.

Note:  VSI or Thick Film measurement requires 10 or fewer visible fringes
           A VXI or PSI measurement requires 5 or fewer visible fringes.

Hint:  Tilt may be used to bring a 90 degree sidewall into view for measurement, or to scan for slight undercuts

This is the user manual for the GT-K from the manufacturer:

Here is a chart showing much information regarding the objectives: