H2S CVD Furnace

Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	Relocating Furnace
Issue Date and Description	19 Dec 2024 Relocating
Estimated Fix Date and Comment
Responding Staff	R. Hosler

Furnace is moving to BRK2221. Should be complete in early 2025.

Specialty furnace/RF power source combination.

SOP:

2D-CVD SOP (Aug 2020).pdf

MSDS:

iLabs Link:

H2S CVD Furnace