Epigress

Owned by Former user (Deleted)
Last updated: Feb 05, 2019 by Wirth, Justin C
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Epigress
iLab Kiosk: BRK Growth Core
FIC: Michael Capano
Owner: Dallas Morisette
Location: BRK 2221
Maximum Wafer Size: 2"/50 mm or 6"/150 mm

Overview

General Description

  • Metal Organic Chemical Vapor Deposition system for growing Silicon Carbide and Graphene.
  • Capable of p and n type growth.

Specifications

  • Grows single crystal on pieces up to six inch wafers.
  • No metals are allowed in this system.
  • Growth temperatures from 1100 C to 1650 C

Technology Overview 

 

 

Sample Requirements and Preparation

Silicon Carbide, Si

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References