iLab Name: Epigress
iLab Kiosk: BRK Growth Core
FIC: Michael Capano
Owner: Dallas Morisette
Location: BRK 2221
Maximum Wafer Size: 2"/50 mm or 6"/150 mm

Overview

General Description

• Metal Organic Chemical Vapor Deposition system for growing Silicon Carbide and Graphene.

• Capable of p and n type growth.

Specifications

• Grows single crystal on pieces up to six inch wafers.

• No metals are allowed in this system.

• Growth temperatures from 1100 C to 1650 C

Technology Overview 

Sample Requirements and Preparation

Silicon Carbide, Si

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References