Ozone Delivery System - IN USA Model ODS-9000 Series (Model ODS-9025-A)
- Former user (Deleted)
Location: Cleanroom GH Chase
Overview
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Info
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Note
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Use of controls, adjustments, or procedures other than those specified in this manual without consulting a competent safety professional may result in exposure to potential hazards.
Ozone (O3) is a toxic gas. High concentrations of ozone are dangerous and harmful to humans. Take reasonable steps to avoid exposure. The current maximum 8-hour exposure limit for ozone is 0.1 PPM (according to U.S. OSHA). Concentrations above 0.1 ppm can cause headaches, eye irritation, respiratory problems, dizziness, and nausea. At much higher concentrations it can cause death.
Non-flammable materials may become flammable in the presence of high oxygen and/or ozone concentrations!
The ozone monitor contains an ultraviolet (UV) lamp. Never remove the lamp from its housing while the unit is powered on. Eye exposure to UV light is extremely dangerous.
General Description
Ozone generator supplying ozone to the Fiji ALD and Black Magic Systems, located in GH Chase of the cleanroom, consists of two main components.
ODS-9000 Series high-purity ozone generator
The ozone generator contains ozone generating equipment and controls including an oxygen and nitrogen MFCs, an in-line ozone concentration sensor (gFFOZ).
Specifications
Oxygen Flow: 0.25 to 5 slpm
Ozone Outlet Pressure: Internally set to 30 PSIG
Ozone Outlet Flow Range: 0-5000 sccm
Control Panel (Reference image below)
A - Power Breaker Switch: This breaker is used to switch the AC power to the unit. When the switch is in the up position the power is ON.
B - Set Point Potentiometer: This potentiometer controls the amount of power delivered to the generating cells, and ultimately the amount of ozone produced. The power applied is indicated in the display directly above as 0 - 100%.
C - Ozone ON - OFF/Reset Switch: Assuming all requirements are met, setting this switch to the Ozone ON position will apply power to the ozone generating cells. Setting the switch to the OFF position will remove power from the ozone generating cells. Status of the ozone generating cells is indicated by the two LEDs directly above the switch.
OZONE ON: This LED is lit when power is applied to the ozone generating cells and no alarm conditions are present.
STANDBY: This LED is lit when no alarm conditions are present and the generator is ready to produce ozone, but has not yet applied power to the generating cells.
D - Local - Remote Switch: In the LOCAL position, operation of the ozone generator is from the front panel controls. In the REMOTE position, control is from the connector located in the rear panel. For our installation at Birck, we will use LOCAL control.
E - System status indicating LEDs: A series of LEDs indicating if the system is experiencing problems.
SYSTEM FAULT: This indicator is ON when the control electronics detects an over-temperature condition in either the High Voltage Power Supply’s switching transistors; the power magnetic components; or the generating cells. The control electronics shuts off the HVPS and the unit remains in this state until a reset signal is detected.
OVERVOLTAGE: This indicator is ON when an over-voltage condition is detected at the high voltage power supply (HVPS). The control electronics shuts off the HVPS and the unit remains in this state until a reset signal is detected.
EXT. INTERLOCK: This indicator is ON when the EXT. INTERLOCK signal (Pin #12 in the REMOTE INTERFACE CONNECTOR) is HIGH. In our installation this signal originates from the SCI-TURBO-L controller and typically lights as a result of no gas flow. This is expected in idle conditions.
INT. INTERLOCK: This indicator is ON when the control electronics detects that the internal interlock conditions are not met. This indicator is ON if there is not enough chilled water flow or if the top cover has been removed.
SCI-TURBO-L controller
The SCI-TURBO-L controller connects to the ozone generator and controls the flowrate of each process gas, ensures safety interlocks are met, and displays ozone concentrations.
Specifications
Ozone concentration measurement resolution: 0.01 % w/w
Continuous measurement increment: Refresh every 2 seconds (0.5 Hz)
Control Panel (Reference image below)
Scroll Key - Used to scroll through the lower level menu items.
Up Arrow Key - Used to make changes to editable menu items. For example, increasing a set point from 0 to 5 VDC will require pressing this button on the left most digit to increase its value from 0 to 1 to 2...etc. 
Left Arrow Key - Used to move character by character through an editable menu item or toggling menu options.
Enter Key - Used to enter a menu, or to return from a menu depending on the menu state. The Enter key is used to proceed with certain options on the Main Menu and to view error messages. Instructions for its use are provided on the screen for the option.
D Key - Used to cycle through the top-level menu. When the last screen is reached, press the " D " key again to return to the first screen.
Standard Operating Procedure
Starting the Ozone delivery system
Unless the ozone delivery system is currently being used, you will find the system is not operating and gases are not flowing. Identified by the following initial state of the tool.
Verify Current Status of the Ozone Generator
Confirm Gases and Cooling water are supplied to the system
- House supplied service locations
- A - Ozone Generator Rack
- B - Process Cooling Water Tree
- C - Compressed Dry Air
- D - Ozone delivery valve manifold box
- E - Process O2 and N2 supply
- Verify that water is flowing through the generator by looking at flow meter, labeled A in the image below. Typical value should be approximately 3.5 GPM. This process cooling water tree feeds two systems, and has two flow meters on the return line. Flow meter labeled B, indicates waterflow to the Black Magic system and should approximately 1.5 GPM. Flow meter labeled A indicates the total flow for the return leg of the process cooling water tree. So flow to the ozone generator can be found as follows: Flow = A - B.
- Verify compressed dry air supply is available. Pressure gauge should read approximately 60 psi.
- Verify that output gas can flow out of the generator by inspecting the VMB (valve manifold box) located behind the generator rack. All gauges should indicate 0 PSI assuming you are bringing the system up from long standby/idle. If a pressure close to 30 PSI exists, no gas will be able to flow, and the EXT. INTERLOCK will not be met preventing operation of the ozone generating cell.
- Verify that O2 and N2 gases are supplied at approximately 50 PSI.
Sci-Turbo L Controller
- The Ozone concentration readings screen, shown below, is the top level menu and should be displayed when you arrive. If you are not at this screen, then press
repeatedly to advance menus until this screen is displayed. Verify the value for ozone generating cell A is 0.0 and the remaining cells show "-----" indicating they are not equipped. All button counts instructions below assume you are starting from this screen on the SCI-TURBO-L controller. Reference page 46 of Mini ODS 610-0113-01_B.pdf for full menu layout and access.
- Press 12 times to reach the MFC RD Screen, make sure you see "RD"(Reading) in the upper right not "SP"(Set Point). Verify the controller shows 0 on all values, indicating O2 and N2 supply gas MFC's are turned off.
ODS-9000 Series high-purity ozone generator
- A - Set Point Potentiometer is turned counter clockwise until it stops and display indicates 00 % power
- B - Ozone Switch is in the OFF/RESET (Down) position with no LEDs lit.
- C - Toggle switch is in the LOCAL position (Up) and indicated by the green LED next to LOCAL being lit.
- D - The EXT. INTERLOCK system status indicating LED is lit red, indicating Ext. Interlock conditions are not met. This condition is typically due to the lack of gas flow as MFCs are currently off.
If the conditions above exist, you have confirmed that the Ozone Generator is in standby mode and will need to be started to use ozone in your process.
Turn on gas flow to the ozone generator cell
All commands for this step will be entered using the SCI-TURBO L controller input panel, shown below.
- Press 13 times from the start screen to advance the display to the "MFC PARAMETERS" menu.
- Press
to access "MFC N SETTING" menu. - Press
to access "MFC A SETTING" menu. - Press to access the "MFC SETPOINT" value.
- Press
3 times to activate the first whole number. - Press
5 times or until 5 is displayed. - Press to input 5.00 VDC as the "MFC SETPOINT" (Maximum value) and exit to the "MFC PARAMETERS" menu.
Note that the Nitrogen MFC is slaved to its respective Oxygen MFC; when the setpoint of the Oxygen MFC is changed, the setpoint of its corresponding Nitrogen MFC is mirrored. However, if only the Nitrogen MFC setpoint is changed, the Oxygen MFC setpoint value is not mirrored.
- On the ODS-9000 Series high-purity ozone generator panel you should now see the Red "EXT. INTERLOCK" LED has shut off. You should also now see the green STANDBY LED lit above the OZONE ON - OFF/RESET switch. This indicates all interlocks have been met the ozone generator cell is prepared to be activated.
- Press 16 times to advance to the MFC RD Screen. Verify that you see "RD" in the upper right corner to indicate reading, verses "SP" for setpoint. Make sure you see 5.00 displayed for both A and C. Valve C is a slave to valve A and should automatically set itself to the same input you entered for valve A.
- Press 5 times to advance to the ozone concentration reading display.
- You have now met and verified all interlock requirements, started gas flow, and prepared the controller for setting ozone dosage.
Turn on ODS-9000 Series high-purity ozone generator cell and start making ozone.
- Flip OZONE ON - OFF/RESET toggle switch to On position (Up). The green LED indicator for "OZONE ON" should light.
- It is recommended to allow the ozone generator cell to operate and stabilize for about 10 minutes at 50% power before using ozone in your process. Rotate the potentiometer knob clockwise until 50 is displayed.
- Rotate Knob clockwise to increase the power or counterclockwise to decrease the power to the ozone generating cell, which raises and lowers concentration.
- High flow rate is not required to supply systems currently attached to the ozone generator. Reset the flow MFC setpoint to 1.00 VDC for the remainder of your usage.
- Press 13 times from the start screen to advance the display to the "MFC PARAMETERS" menu.
- Press to access "MFC N SETTING" menu.
- Press to access "MFC A SETTING" menu.
- Press to access the "MFC SETPOINT" value.
- Press 3 times to activate the first whole number.
- Press 6 times or until 1 is displayed.
- Press to input 1.00 VDC as the "MFC SETPOINT" (Maximum value) and exit to the "MFC PARAMETERS" menu.
Note that the Nitrogen MFC is slaved to its respective Oxygen MFC; when the setpoint of the Oxygen MFC is changed, the setpoint of its corresponding Nitrogen MFC is mirrored. However, if only the Nitrogen MFC setpoint is changed, the Oxygen MFC setpoint value is not mirrored.
- Press 4 times to advance to the ozone concentration reading display.
- Set dosage by adjusting the power to the generating cell and watching the ozone concentration reading display on the SCI-TURBO L controller display. It will take a few minutes to stabilize after each adjustment. See table below for guidance on setting power.
Power Level Ozone Concentration @ 1.0 VDC MFC Setpoint (mg/L) Ozone Concentration @ 2.0 VDC MFC Setpoint (mg/L) Ozone Concentration @ 3.0 VDC MFC Setpoint (mg/L) Ozone Concentration @ 4.0 VDC MFC Setpoint (mg/L) Ozone Concentration @ 5.0 VDC MFC Setpoint (mg/L) 0 0 0 0 0 0 10 107 0 11 0 0 20 210.5 131 81.5 47 20.8 30 324 206 160.5 120 85 40 374 250 205 166 139 50 375 275 234 195 180 60 360 287 252 215 197.5 70 340 292 256 226 213 80 320 300 236 228 221.5 90 305 295 245 225 219 100 300 295 249 218 214.5
- The ozone generating system is now operational and producing ozone, verified by the ozone concentration indicated on the SCI-TURBO L controller display.
Placing the Ozone delivery system in standby/idle
Turn off ODS-9000 Series high-purity ozone generator cell and stop making ozone.
- Set Point Potentiometer is turned counter clockwise until it stops and display indicates 00 % power.
- Flip OZONE ON - OFF/RESET toggle switch to off position (down). The green LED indicator for "OZONE ON" should turn off, and LED for "STANDBY" will light.
Allow gas to continue to flow through the generator for 1 hour to purge/flush any residual ozone from the system. At this point the SCI-TURBO L ozone concentration reading should be 0.0. No further decontamination is required.
Turn off gas flow to the ozone generator cell
All commands for this step will be entered using the SCI-TURBO L controller input panel, shown below.
- Press 13 times from the start screen to advance the display to the "MFC PARAMETERS" menu.
- Press to access "MFC N SETTING" menu.
- Press to access "MFC A SETTING" menu.
- Press to access the "MFC SETPOINT" value.
- Press 3 times to activate the first whole number.
- Press 5 times or until 0 is displayed.
- Press to input 0.00 VDC as the "MFC SETPOINT" (off value) and exit to the "MFC PARAMETERS" menu.
Note that the Nitrogen MFC is slaved to its respective Oxygen MFC; when the setpoint of the Oxygen MFC is changed, the setpoint of its corresponding Nitrogen MFC is mirrored. However, if only the Nitrogen MFC setpoint is changed, the Oxygen MFC setpoint value is not mirrored.
- On the ODS-9000 Series high-purity ozone generator panel you should now see the Red "EXT. INTERLOCK" LED has turned on. You should also now see the green STANDBY LED above the OZONE ON - OFF/RESET switch has turned off. This indicates that one or more interlocks have not been met and the ozone generator cell cannot be activated.
- Press 16 times to advance to the MFC RD Screen. Verify that you see "RD" in the upper right corner to indicate reading, verses "SP" for set point. Make sure you see 0.00 displayed for both A and C. Valve C is a slave to valve A and should automatically set itself to the same input you entered for valve A.
- Press 5 times to advance to the ozone concentration reading display.
- You have now turned off gas flow to the ozone generator system and placed the system in standby/idle.
Fiji F200 ALD System
There is considerable length of tubing between the ozone generator installation location and the Fiji ALD system. Ozone decomposes back to O2 inside the tubing over time. It is estimated that this length of time is on the order of hours to days before total decomposition. Therefore, it is recommended that you purge the line between the ozone generator and the Fiji ALD instrument once a stable ozone dosage rate is achieved at the generator. The volume of tubing is estimated to be 32 cm3. Purge time should be based on flow rate settings at the generator and exchange the full volume several times.
The Fiji is equipped with a flow control and bypass at the tool to allow a constant flow of freshly produced ozone from the generator to reach the ALD manifold. This bypass is exhausted for safety. A check valve prevents back flow when the ozone generator is off and/or evacuation of the line for maintenance.