Glovebox - Kratos Axis Ultra DLD XPS

Owned by Wirth, Justin C
Last updated: Dec 17, 2019
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name

Glovebox - Kratos Axis Ultra DLD XPS

iLab Kiosk

BRK Metrology Core

FIC

Dmitry Zemlyanov

Owner

Dmitry Zemlyanov

Location

BRK 1077

Max. Wafer

N/A

Internal Page
Staff Page

Overview

General Description

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Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References