Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name	Glovebox - Kratos Axis Ultra DLD XPS
iLab Kiosk	BRK Metrology Core
FIC	Dmitry Zemlyanov
Owner	Dmitry Zemlyanov
Location	BRK 1077
Max. Wafer	N/A
Internal Page
Staff Page

Overview

General Description

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Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

Glovebox - Kratos Axis Ultra DLD XPS

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