Biohood

Owned by Former user (Deleted)
Last updated: Nov 30, 2020 by Neil Dilley
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name:
iLab Kiosk:
FIC:  
Owner: Yunfeng Bai
Location: BRK 1081
Maximum Wafer Size:

Overview

General Description

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References