Aixtron BlackMagic ALD

Owned by Former user (Deleted)
Last updated: Apr 26, 2024 by Wirth, Justin C
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Aixtron BlackMagic ALD
iLab Kiosk: BRK Growth Core
FIC: Piede Ye
Owner: N/A
Location: Cleanroom - G Bay
Maximum Wafer Size: 2"/50 mm

Overview

General Description

Graphene based thermal and plasma ALD.

Specifications

Please see PI for sample approval.

Technology Overview 

Ti, Au, Cr, Pt


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References