Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name: Aixtron BlackMagic ALD
iLab Kiosk: BRK Growth Core
FIC: Piede Ye
Owner: N/A
Location: Cleanroom - G Bay
Maximum Wafer Size: 2"/50 mm

Overview

General Description

Graphene based thermal and plasma ALD.

Specifications

Please see PI for sample approval.

Technology Overview

Ti, Au, Cr, Pt

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

Aixtron BlackMagic ALD

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