Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name: Asylum_Cypher_BRK
iLab Kiosk: BRK Metrology Core
FIC: Arvind Raman
Owner: Arvind Raman
Location: BRK 1089
Maximum Wafer Size: 6"/150 mm

Overview

General Description

General purpose AFM with an open loop scanner, xy range of 30-40 µm, z range of 5-7 µm. This system has a Nanoscope IIIA controller and version 4 of the software.

Highest resolution fast scanning AFM.
Highlights: closed loop atomic resolution, automated laser alignment, laser spot size as small as 3µm, high resolution top-view optics.
Standard scanning modes available, operation in air and liquid.
More details at http://www.asylumresearch.com/products/cypher/cypher.shtml

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

Asylum Cypher