Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name: Asylum_Cypher_BRK
iLab Kiosk: BRK Metrology Core
FIC: Arvind Raman
Owner: Arvind Raman
Location: BRK 1089
Maximum Wafer Size: 6"/150 mm

Overview

General Description

General purpose AFM with an open loop scanner, xy range of 30-40 µm, z range of 5-7 µm. This system has a Nanoscope IIIA controller and version 4 of the software.

Highest resolution fast scanning AFM.
Highlights: closed loop atomic resolution, automated laser alignment, laser spot size as small as 3µm, high resolution top-view optics.
Standard scanning modes available, operation in air and liquid.
More details at http://www.asylumresearch.com/products/cypher/cypher.shtml

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Asylum Cypher