Neaspec IR-Neascope - TERS - NSOM - TEPL
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iLab Kiosk | |
FIC | |
Owner | |
Location | BRK 1045 |
Max. Wafer | Typically <1'' chip |
Info Links |
Highlights
Near-field Scanning Optical Microscopy (SNOM) using an Optical Parametric Oscillator (OPO) laser tunable from ~1.5 um to ~17 um.
Nano-Raman/Photoluminescent spectroscopy with 532 excitation laser up to 950-nm sensing range.
Tip-enhanced Photocurrent Measurement.
Kelvin Probe Force Microscopy.
Tip Force Microscopy.
Piezo Force Microscopy.
Conductive Atomic Force Microscopy.
Overview
General Description
Instrument is used for characterization of materials in nanoscale via near-field optical imaging, Raman and photoluminescent spectroscopy.
Can operate in different modes:
Scattering type Scanning Near-field Optical microscopy (s-SNOM) over broad frequency range
Point spectroscopy with PhSet.
Tip-enhanced Raman Spectroscopy (TERS)
Tip-enhanced Photoluminescence (TEPL)
Specifications
s-SNOM
Equipped with a mid-infrared tunable OPO laser, this instrument enables nanoscale imaging at wavelengths from 1403 nm to 17000 nm with spatial resolutions down to 20-nm.
Point Spectroscopy
Widely tunable OPO laser can shine on an AFM tip over broad wavelength range and enable both amplitude and phase spectroscopy at any spatial point of interest.
Laser output range is shown below:
TERS/TEPL
Single-line Raman spectroscopy using a 532 nm excitation wavelength enables measurements from the reflection line to nearly 1 µm, with a spectral resolution of 5 cm⁻¹.
Technology Overview - Remove if multiple tools use the same technology/process
Highlights of the technique can be found in : Neaspec - SNOM
Sample Requirements and Preparation
The typical sample size is 1'' × 1'', although sizes up to approximately 4 inches are physically permissible.
Standard Operating Procedure
Please contact with owner (Hakan Salihoglu).
Questions & Troubleshooting
Question about tool use or process result?
Answer to question.
Process Library
Create process template for tool, allows a user to fill in the details of their process.
References
Manufacturer brochures, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.