Neaspec IR-Neascope - TERS - NSOM - TEPL

Neaspec IR-Neascope - TERS - NSOM - TEPL

 

 

iLab Name

Neaspec IR-Neascope - TERS - NSOM - TEPL

iLab Kiosk

BRK Metrology Core

FIC

Thomas Beechem

Owner

Hakan Salihoglu

Location

BRK 1045

Max. Wafer

Typically <1'' chip

Info Links

Internal Staff

 

BRKSC-HS-_40__Schematic-IR-neaSCOPE_Raman-31Aug2023-TG- (3).jpg

Highlights

  • Near-field Scanning Optical Microscopy (SNOM) using an Optical Parametric Oscillator (OPO) laser tunable from ~1.5 um to ~17 um.

  • Nano-Raman/Photoluminescent spectroscopy with 532 excitation laser up to 950-nm sensing range.

  • Tip-enhanced Photocurrent Measurement.

  • Kelvin Probe Force Microscopy.

  • Tip Force Microscopy.

  • Piezo Force Microscopy.

  • Conductive Atomic Force Microscopy.

Overview

General Description

Instrument is used for characterization of materials in nanoscale via near-field optical imaging, Raman and photoluminescent spectroscopy.

Can operate in different modes:

  • Scattering type Scanning Near-field Optical microscopy (s-SNOM) over broad frequency range

  • Point spectroscopy with PhSet.

  • Tip-enhanced Raman Spectroscopy (TERS)

  • Tip-enhanced Photoluminescence (TEPL)

Specifications

s-SNOM

Equipped with a mid-infrared tunable OPO laser, this instrument enables nanoscale imaging at wavelengths from 1403 nm to 17000 nm with spatial resolutions down to 20-nm.

Point Spectroscopy

Widely tunable OPO laser can shine on an AFM tip over broad wavelength range and enable both amplitude and phase spectroscopy at any spatial point of interest.

Laser output range is shown below:

image-20250718-181950.png
midIR tunable OPO laser output power vs. spectrum.

 

TERS/TEPL

Single-line Raman spectroscopy using a 532 nm excitation wavelength enables measurements from the reflection line to nearly 1 µm, with a spectral resolution of 5 cm⁻¹.

Technology Overview - Remove if multiple tools use the same technology/process

Highlights of the technique can be found in : Neaspec - SNOM

 

Sample Requirements and Preparation

The typical sample size is 1'' × 1'', although sizes up to approximately 4 inches are physically permissible.

 

Standard Operating Procedure

Please contact with owner (Hakan Salihoglu).

 

Questions & Troubleshooting

Question about tool use or process result?
Answer to question.

 

Process Library

Create process template for tool, allows a user to fill in the details of their process. 

 

References

Manufacturer brochures, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.