Carbon Nanotube PECVD

Owned by Former user (Deleted)
Last updated: Feb 05, 2019 by Wirth, Justin C
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Carbon Nanotube PECVD
iLab Kiosk:
FIC: Tim Fisher
Owner: Dave Lubelski
Location: BRK 2283
Maximum Wafer Size: 2"/50 mm

Overview

General Description

Seki Techtron Diamond PECVD modified to grow carbon nanotubes.

Specifications

Limited access, see PI.

Technology Overview 

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References