Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name: Carbon Nanotube PECVD
iLab Kiosk:
FIC: Tim Fisher
Owner: Dave Lubelski
Location: BRK 2283
Maximum Wafer Size: 2"/50 mm

Overview

General Description

Seki Techtron Diamond PECVD modified to grow carbon nanotubes.

Specifications

Limited access, see PI.

Technology Overview

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

Carbon Nanotube PECVD

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