Themis Z Aberration Corrected Scanning/Transmission Electron Microscope
iLab Name: Themis Z Aberration Corrected STEM/TEM
iLab Kiosk: Purdue Electron Microscopy Facility
FIC: Zhihong Chen
Owner: Rosa E Diaz
Location: BRK 1269
Sample thickness: 100 nm or less
Overview
General Description
The spherical aberration corrected Themis-Z™ is equipped with a high coherence, high brightness, field emission electron gun (X-FEG), and an electron gun monochromator to provide useable probe current with an energy resolution of 0.13 eV. Our Themis-Z™ delivers imaging capabilities for atomic resolution in both high resolution TEM and STEM, at accelerating voltages of 60, 80, 200 and 300 kV - STEM and TEM resolution can get down to <65 pm at 300kV.
The system contains a high-speed, high-throughput, quad-silicon drift detector (Super-X) optimized for rapid x-ray collection and when combined with STEM enables EDS spectral mapping down to the atomic scale. This system is also equipped with Gatan Digiscan™ to produce high-speed spectral maps from electron energy loss spectroscopy (EELS) data. A dual-EELS spectrometer permits the user to collect low-loss and core-loss EELS simultaneously to produce, rapidly and routinely, atomic resolution EELS spectrum images.
To improve reproducibility, the user has access to OptiMONO and OptiSTEM+, both are software that align, automatically, the monochromator and the imaging probe to remove user error and reach the ultimate resolution most quickly. The system is also equipped with a 4-segment annular detector and the EMPAD pixelated detector enabling differential phase contrast imaging (DPC) and integrated differential phase contrast imaging (iDPC), just to list a few. The combinations of these spectral collection tools, energy resolution and variable voltage make the probe corrected Themis-Z™ a powerful characterization tool in the modern materials world.
The system is housed in an acoustic, thermal, and electro-magnetically isolated, high-stability support box that reduces negative environmental conditions permitting optimal aberration corrected S/TEM characterization to be realized. The instrument is also available for remote viewing access and remote user control providing benefits and access to users both locally and around the state of Ohio through OARnet.
Specifications
- High-resolution imaging with 1 Ångström information limit
- Environmental Cell allows up to 20 Torr of gas pressure during in-situ observation at elevated temperatures
- High-resolution STEM imaging with High-Angle Annular Dark-Field (HAADF) detector
- 3-D imaging through tomography
- Chemical analysis & filtered imaging though Electron Energy Loss Spectroscopy (EELS)
Technology Overview
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library