Jeol JCM 5000 Neoscope SEM
Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.
| Status | UP |
| Issue Date and Description | |
| Estimated Fix Date and Comment | |
| Responding Staff | Bill Rowe |
iLab Name: JEOL JCM 5000 Neoscope SEM
iLab Kiosk: BRK Metrology Core
FIC: Shared
Owner: Bill Rowe
Location: BRK 2100F
Maximum Wafer Size: 4"/100 mm
Overview
General Description
The JCM-5000 NeoScope™ economically complements both optical microscopes and traditional SEMs. The NeoScope™ makes it easy to obtain high magnification images with high resolution and large depth of field using a microscope that is as simple to operate as a digital camera, but has the powerful electron optics of an SEM.
Whether used by trained electron microscopists as a simple screening instrument, or by lab technicians as a higher resolution alternative to the light microscope, the NeoScope™ will help accelerate the pace of research in the life sciences, forensics, and failure analysis of manufacturing materials.
Basic operation of the NeoScope™ is simple with auto focus, auto contrast and auto brightness controls. No special sample preparation, such as coating or drying, is required. The NeoScope™ operates in both low and high vacuum modes and has three settings for accelerating voltage suitable for a variety of applications, all of which can be programmed in special pre-stored recipe files.
SEM Jeol JCM 5000
Technology Overview - Remove if multiple tools use the same technology/process
Electron beam technology.
Sample Requirements and Preparation
Sample size: 70mm Diameter 50mm Height
In addition, please follow the requirement of cleanroom, powders will not be allowed.