Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff	Bill Rowe

iLab Name: JEOL JCM 5000 Neoscope SEM
iLab Kiosk: BRK Metrology Core
FIC: Shared
Owner: Bill Rowe
Location: BRK 2100F
Maximum Wafer Size: 4"/100 mm

Overview

General Description

The JCM-5000 NeoScope™ economically complements both optical microscopes and traditional SEMs. The NeoScope™ makes it easy to obtain high magnification images with high resolution and large depth of field using a microscope that is as simple to operate as a digital camera, but has the powerful electron optics of an SEM.

Whether used by trained electron microscopists as a simple screening instrument, or by lab technicians as a higher resolution alternative to the light microscope, the NeoScope™ will help accelerate the pace of research in the life sciences, forensics, and failure analysis of manufacturing materials.

Basic operation of the NeoScope™ is simple with auto focus, auto contrast and auto brightness controls. No special sample preparation, such as coating or drying, is required. The NeoScope™ operates in both low and high vacuum modes and has three settings for accelerating voltage suitable for a variety of applications, all of which can be programmed in special pre-stored recipe files.

Magnification ×10 to ×40,000Observation mode High vacuum mode, Low vacuum modeElectron source Small cartridge electron sourceAccelerating voltage 15kV, 10kV, 5kVSpecimen stage Manual, X 35mm, Y 35mmMaximum specimen size 70mm Diameter 50mm HeightDetector Secondary electron detector, Backscattered electron detectorData display Accelerating voltage, magnification, micron bar, micron valueDigital image 1,280ｘ1,024 pixels, bmp, tif, jpgOS Windows® VISTA、Windows® 7Automatic operation Electron source, focus, brightness, contrast, and astigmatismComposition Main console + RP (20L/min)Main console dimensions W492ｘD458ｘH434mmElectric power Single phase AC100V (400VA) 240V (1,100VA) 50Hz/60HzRoom temperature 15℃ to 30℃Humidity 70％ or less.

Technology Overview - Remove if multiple tools use the same technology/process

Electron beam technology.

Sample Requirements and Preparation

Sample size: 70mm Diameter 50mm Height

In addition, please follow the requirement of cleanroom, powders will not be allowed.

Standard Operating Procedure

Questions & Troubleshooting

Jeol JCM 5000 Neoscope SEM