Jeol JCM 5000 Neoscope SEM

Owned by Wirth, Justin C
Last updated: May 02, 2022
2 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding StaffBill Rowe








iLab Name: JEOL JCM 5000 Neoscope SEM
iLab Kiosk: BRK Metrology Core
FIC: Shared
Owner: Bill Rowe
Location: BRK 2100F
Maximum Wafer Size: 4"/100 mm



Overview

General Description

The JCM-5000 NeoScope™ economically complements both optical microscopes and traditional SEMs. The NeoScope™ makes it easy to obtain high magnification images with high resolution and large depth of field using a microscope that is as simple to operate as a digital camera, but has the powerful electron optics of an SEM.

Whether used by trained electron microscopists as a simple screening instrument, or by lab technicians as a higher resolution alternative to the light microscope, the NeoScope™ will help accelerate the pace of research in the life sciences, forensics, and failure analysis of manufacturing materials.

Basic operation of the NeoScope™ is simple with auto focus, auto contrast and auto brightness controls. No special sample preparation, such as coating or drying, is required. The NeoScope™ operates in both low and high vacuum modes and has three settings for accelerating voltage suitable for a variety of applications, all of which can be programmed in special pre-stored recipe files.

 Specifications

Magnification ×10 to ×40,000Observation mode High vacuum mode, Low vacuum modeElectron source Small cartridge electron sourceAccelerating voltage 15kV, 10kV, 5kVSpecimen stage Manual, X 35mm, Y 35mmMaximum specimen size 70mm Diameter 50mm HeightDetector Secondary electron detector, Backscattered electron detectorData display Accelerating voltage, magnification, micron bar, micron valueDigital image 1,280ｘ1,024 pixels, bmp, tif, jpgOS Windows® VISTA、Windows® 7Automatic operation Electron source, focus, brightness, contrast, and astigmatismComposition Main console + RP (20L/min)Main console dimensions W492ｘD458ｘH434mmElectric power Single phase AC100V (400VA) 240V (1,100VA) 50Hz/60HzRoom temperature 15℃ to 30℃Humidity 70％ or less.

SEM Jeol JCM 5000

Technology Overview - Remove if multiple tools use the same technology/process

Electron beam technology.

Sample Requirements and Preparation

Sample size: 70mm Diameter 50mm Height

In addition, please follow the requirement of cleanroom, powders will not be allowed.

Standard Operating Procedure

Questions & Troubleshooting


Process Library

References