Overview

General Description

Specifications

• Scanner
  • Z scanner (AFM Head): Flexure guided high-force scanner, Scan range: 15um / Typical sample height to measure: <1um
  • XY scanner: Dual-servo closed-loop feedback control for precise XY positioning, Scan range: 100um x 100um / If you would like to scan more than 50um far from the initial engage point, the scanner should be redraw and engage again.
• Stage
  
  • XY stage travel range: 200mm
  • Z stage travel range: 25mm
  • Focus stage travel range: 8mm
• Vision
  • Field of view: 840um x 630um
  • 10 x ultra-long working distance lens 

Technology Overview

• Contact mode
• Non-contact mode
• Tapping mode

Sample Requirements and Preparation

Standard Operating Procedure

• SOP (13 Jun 2022)

• Clip Type Chip Carrier Guide

Questions & Troubleshooting

Process Library

References