SCS 6808P Spinner - Internal Resources

iLab Name: Spinner2

iLab Kiosk: BRK Lithography Core
FIC: David Janes
Owner: Joon Park
Location: Cleanroom - M Bay
Maximum Wafer Size: 6"/150 mm

Overview

General Description

The Specialty Coating System 6800 is a programmable spin coating system to apply a liquid coating (i.e. photoresist) to a planar substrate. Multistep spin recipes with independent acceleration/deceleration, spin speed, and spin duration may be programmed quickly through the controller. The machine is a single chuck unit that requires manually loading and unloading substrates. A microprocessor controls recipes as well as operation of the unit.

Specifications

• Program storage: 3 programs, up to 8 steps each

• Maximum substrate size: 6" (bowl limited)

• Speed: 0 - 9,999 RPM (maximum of 8000 RPM recommended) in 1 RPM increments with ± 1 to 3 RPM accuracy.

• Acceleration/Deceleration time: 0.1 - 30 s in 0.1 s step with ± 0.05 s accuracy.

• Dwell (spin time) per step: 0 - 999 s in 1.0 s increments with ± 0.05 s accuracy.

Sample Requirements and Preparation

For the spinner itself, the only cleanliness requirement is that the backside is clean (and free of photoresist). However, cleanliness is very important for the further processing that the sample will experience.

Samples should at least be cleaned with the standard solvent clean, and Piranha cleaning may be used for substrates that will tolerate it. Adhesion of the photoresist will depend on the surface state of the wafer, and a clean, dehydrated, hydrophobic surface will offer ideal adhesion.

Standard Operating Procedure

Potentially useful excerpts from the 6800 Manual:

• "The 6800 Spin Coater Series is a family of compact spin coaters for low production spin coating applications and experimentation. The 6800 Spin Coater Series provides the ability to hold a product with a vacuum chuck and spin that chuck at precise speeds and for controlled periods of time. Operations are extremely repeatable and are settable to 0.1 second. The chuck is indexed back to its initial position at the end of each cycle, so that each wafer may be oriented the same way on the chuck. See the Specifications Section for more information."

• "Operation of the spin coater is controlled by a user friendly keypad. During a cycle, the spinning speed and remaining time are displayed on a user interface screen. The acceleration and deceleration rates are calculated by the controller to provide various ramp profiles. A recipe contains cycle information such as speed, ramp up time, ramp down time, and dwell time at speed."

• "For safety reasons, the machine will shut off if the lid is removed."

• "Remember that the unit will not run unless programmed, and that the lid must be opened and closed before each cycle (indicating that material has been placed in the spin coater)."

• Vacuum chuck selection:
  "Chuck selection should be based on object size and rigidity. The proper chuck diameter is 1/4 to 1 inch (0.6 to 2.5cm) smaller than an object’s diameter. The entire object should be supported if it is flexible, fragile, or if it is to be wiped or brushed during cleaning. Centering is done manually; use templates and measurements for further assistance when centering. Use Step 0 in a recipe to set the chuck size. Designate the chuck size appropriately:"

  1: Chuck diameter ≤ 1" (25 mm).
  2: Chuck diameter ≤ 2" (50 mm) and ≥ 1" (25 mm).
  4: Chuck diameter ≤ 4" (100 mm) and ≥ 2" (50 mm).
  6: Chuck diameter ≤ 6" (150 mm) and ≥ 4" (100 mm).
  
  
  

• Step Zero: "Step 0 is the step that tells the spin coater how large the vacuum chuck is. Enter the size in the Disp blank by selecting the number that (most nearly) represents the diameter of the chuck.
  
  

• Homing: "to stop the chuck from returning to the Home position at the end of the run, set the step 0 Time to some number other than 0."

• Pause steps: "Pauses at zero RPM can be programmed into the middle of a recipe."

• Extra long periods: "Long periods of the same function can be accomplished using multiple steps."

The 6800 Spin Coater has the following controls:

(Up Arrow): Press the up arrow to increase a selected value or to toggle through the menu.

ENTER: Press the Enter button to make a selection.

(Down Arrow): Press the down arrow to decrease a selected value or to toggle through the menu.

The following are changeable recipe parameters:

Recipe #: This selects the recipe the machine will run.

Ramp: This sets the length of time it will take the chuck to reach the set RPM from the current RPM.

Dwell: This sets the length of time the spin coater will run at the selected RPM.

RPM: This sets how fast the chuck will spin.

Dsp_Type: This sets the dispense type. This is also used to set the chuck size in Step 0 only. The following dispense type options are available:

• 1, 2, 4, or 6. Note: For use with Step 0 only. Set the chuck size appropriately.

• Edge

• Solv

• N2

• Coat

• None
  
  
  

Dsp_Time: This sets the length of time the dispense function will turn on.

To Run a Recipe:

1. Press ENTER on the Run screen.

2. Control Panel