Laurell EDC-650 Spin Processor

Owned by Former user (Deleted)
Last updated: Feb 25, 2020
1 min read




Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff



iLab Name

Laurell EDC-650 Spin Processor

iLab Kiosk

BRK Lithography Core

FIC


Owner


Location


Max. Wafer


Internal Page
Staff Page

Overview

General Description

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Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References