Laurell EDC-650 Spin Processor

Jun 16, 2025

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name	Laurell EDC-650 Spin Processor
iLab Kiosk	BRK Lithography Core
FIC
Owner
Location
Max. Wafer
Internal Page
Staff Page

Overview

General Description

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Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Process Library

References