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iLab Name:
iLab Kiosk: 
FIC: Peide Ye
Owner: Jerry Shepard
Location: Cleanroom - G Bay
Maximum Wafer Size: 6"/150 mm

Overview

General Description

Project# 16-0020

Gemstar ALDs in inert atmosphere glovebox

Specifications

Please see PI for sample approval.

Technology Overview 

Sample Requirements and Preparation

Standard Operating Procedure

LC-200 Double Length Glovebox System from LC Technology Solutions INC

Safety Considerations

	Make sure inert gas is regulated at 60-80 psi.
	Make sure regeneration gas is regulated at 15 psi.
	Common vent line should be vented.
	It is very important to not run out of gas during purging of the glovebox.
	Do not over tighten antechamber door handles.
	Regeneration cycle times are critical to the system running properly. Do not change these settings.
	Do not open glovebox with inert gas on.
	Low oxygen hazard inside glovebox.
	Make sure glovebox is well ventilated before entering.

System Overview

Operating the System

Main Screen

Normal everyday operation of the glovebox will maintain the Chamber Pressure Control and Chamber Circulation in the ON state with no Alarms.

1. 1. 1. 1. Chamber Pressure Control – When this is ON, the system will automatically maintain pressure within glovebox between the High and Low set points.
            1. Normal operation High limit = 2.5 mBAR
            2. Normal operation Low limit = 0.5 mBAR
         2. Foot Pedal Controls - The system has been supplied with foot pedals to help control the pressure when inserting and removing hands from gloves.  Although the Chamber Pressure Control will ensure you do not operate outside the prescribed limits, the foot pedals can make inserting and removing hands much easier by altering the pressure inside the chamber.

Large Antechamber Operation

Demonstration of Large Anti-Chamber Operation

Bringing Items into the Glovebox

1. 1. Make sure antechamber is filled and the vacuum gauge reads zero. 
   2. Open outside antechamber door.
   3. Load green bin or sliding tray with desired material.
      1. If using a system with a sliding tray place items on tray nearest to the inside antechamber door.
   4. Close outside antechamber door.
      CAUTION: Do not over tighten.
   5. This glovebox comes with manual evacuation valve. Turn the evacuation hand valve, located on top of antechamber, to the left.  Antechamber will begin to evacuate.  Continue to evacuate until the vacuum gauge reads -30.
   6. Close evacuation valve by turning the evacuation hand valve to the right.
   7. Refill antechamber using Swagelok refill valve.  Continue to refill until the vacuum gauge reads 0.
   8. Repeat the above cycle two (2) more times for a total of three (3) evacuation/refill cycles.
      NOTE: Before opening the inside door make sure vacuum gauge reads zero (0) & evacuation and refill valves are closed/turned off.
   9. Open inside door, remove green bin or item, and close antechamber door.
      NOTE: When opening the inside door, spin door handle completely until door makes contact with door arm. This is important so door does not make contact with side wall of glovebox and damage the sealing surface.

Removing Items from the Glovebox

1. 1. Evacuate and refill the antechamber three (3) times.
      1. Refer to Section “Bringing Items into the Glovebox“, Steps 5-8 for the evacuation/refill process.
      NOTE: This will ensure the antechamber has inert gas in it.
   2. Open inside antechamber door.
   3. Load green bin/tray into antechamber.
   4. Close inside antechamber door.
   5. Open outside antechamber door.

Mini Antechamber Operation

Bringing Items into the Glovebox

1. 1. Make sure antechamber is filled and the vacuum gauge reads zero. 
   2. Open outside mini antechamber door by pulling up on red lever.
   3. Remove outside mini antechamber door.
   4. Load green bin with desired material.
   5. Slide green bin all the way into antechamber until it comes into contact with inside antechamber door.
   6. Replace outside antechamber door and push red lever down into the locked position.
   7. Turn hand valve to evacuation position.
   8. Continue to evacuate until the vacuum gauge reads -30.
   9. Turn hand valve to refill position.
   10. Continue to refill until the vacuum gauge reads 0.
   11. Repeat the above cycle two (2) more times for a total of three (3) evacuation/refill cycles.
   12. Return hand valve to up (closed) position.
       NOTE: Before opening the inside door make sure vacuum gauge reads zero (0) & evacuation and refill valves are closed/turned off.
   13. Remove inside door, remove green bin and return to chamber when complete.
   14. Replace inside antechamber door and push red lever into the locked position.

Removing Items from the Glovebox

1. 1. Evacuate and refill the antechamber three (3) times.
      1. Refer to Section “Bringing Items into the Glovebox“, Steps 7-11 for the evacuation/refill process.
      NOTE: This will ensure the antechamber has inert gas in it.
   2. Open inside antechamber door.
   3. Load green bin/tray into antechamber.
   4. Close inside antechamber door.
   5. Open outside antechamber door.

Default System Settings

Below is an image showing the factory default chamber settings.

• • • • Chamber Pressure Control High SP: Controls the maximum pressure allowed inside the glovebox.
      • Chamber Pressure Control Low SP: Controls the minimum pressure allowed inside the glovebox.
      • Chamber Gas Solenoid Off Delay SP: Controls how long the gas valve stays open when triggered.
      • Chamber Vacuum Solenoid Off Delay SP: Controls how long the vacuum valve stays open when triggered.
      • Chamber Pressure High Alarm SP: High pressure alarm set point.
      • Chamber Pressure Low Alarm SP: Low pressure alarm set point.
      • Chamber Oxygen Level High Alarm SP: High oxygen level alarm set point.
      • Chamber Moisture Level High Alarm SP: High moisture level alarm set point.