LC Tech Glovebox and ALD Systems
LC Tech Glovebox and ALD Systems - Internal Resources
iLab Name:
iLab Kiosk:
FIC: Peide Ye
Owner: Jerry Shepard
Location: Cleanroom - G Bay
Maximum Wafer Size: 6"/150 mm
Overview
General Description
Project# 16-0020
Gemstar ALDs in inert atmosphere glovebox
Specifications
Please see PI for sample approval.
Technology Overview
Sample Requirements and Preparation
Standard Operating Procedure
LC-200 Double Length Glovebox System from LC Technology Solutions INC
Safety Considerations
| Make sure inert gas is regulated at 60-80 psi. |
Make sure regeneration gas is regulated at 15 psi. | |
Common vent line should be vented. | |
It is very important to not run out of gas during purging of the glovebox. | |
Do not over tighten antechamber door handles. | |
Regeneration cycle times are critical to the system running properly. Do not change these settings. | |
Do not open glovebox with inert gas on. | |
|
Low oxygen hazard inside glovebox. |
Make sure glovebox is well ventilated before entering. |
System Overview
Operating the System
Main Screen
Normal everyday operation of the glovebox will maintain the Chamber Pressure Control and Chamber Circulation in the ON state with no Alarms.
Large Antechamber Operation
Bringing Items into the Glovebox
Removing Items from the Glovebox
Mini Antechamber Operation
Bringing Items into the Glovebox
Removing Items from the Glovebox
Default System Settings
Below is an image showing the factory default chamber settings.