Status	DOWN
Issue Date and Description	Decommissioning
Estimated Fix Date and Comment	ETA Feb 2026
Responding Staff	R. Hosler

THIS TUBE IS CURRENTLY NOT IN OPERATION WHILE THE EXPERTECH FURNACES THAT WILL REPLACE THEM ARE BEING INSTALLED.

ESTIMATED INSTALLATION READYNESS IS OCTOBER 2025.

Protemp Horizontal Furnace - Tube 02 - Silicon Nitride Deposition

iLab Name: C - Tube 02 Nitride Dep
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm (for all furnaces)

Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

Tube 02 - LPCVD Nitride Deposition

Process Temperatures:

Tube 02 - 800°C maximum

Technology Overview

Standard Operating Procedure

- CVD

Questions & Troubleshooting

How long can my recipe go for with this tube? I want to make a thick deposition.

The current maximum length at 800°C is approximately 76 minutes. If this is exceeded you risk melting the silicone o-ring holding the Ammonia and Dicholorosliane in. If you need to do depositions longer than 76 minutes you can re-run the cycle after it fully completes the first time, which gives the o-ring time to cool down.