VTI Glovebox and Gemstar ALD Maintenance Schedule
VTI Glove Box Maintenance Schedule
Next Due Date | Interval | System | Subsystem | Maintenance Description |
|---|---|---|---|---|
2019/07/01 | 1 week | VTI Glovebox / ALD | VTI Glovebox | Check moisture and O2 levels, regenerate / purge as necessary |
Next Due Date | Interval | System | Subsystem | Maintenance Description |
|---|---|---|---|---|
2019/07/01 | 1 week | VTI Glovebox / ALD | VTI Glovebox | Perform 1 min leak test. Should be < 0.1 vol%/hr. |
Next Due Date | Interval | System | Subsystem | Maintenance Description |
|---|---|---|---|---|
2019/08/28 | 3 months | VTI Glovebox / ALD | VTI Glovebox | Perform moisture analyzer maintenance |
Next Due Date | Interval | System | Subsystem | Maintenance Description |
|---|---|---|---|---|
2019/08/28 | 3 months | VTI Glovebox / ALD | VTI Glovebox | Gloves and glove O-rings should be changed once every (3) months or as needed based on the condition. |
|
| Parts Required |
| Gloves, Left/Right, 1 pair (Universal can be used in any Glovebox); 2 pair required |
|
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| Glove O-Rings (4 per pair of gloves); 2 sets required |
Next Due Date | Interval | System | Subsystem | Maintenance Description |
|---|---|---|---|---|
2019/11/29 | 6 months | VTI Glovebox / ALD | VTI Glovebox | The inlet/outlet filters should be replaced every (6) months. |
|
| Parts Required |
| Inlet/Outlet HEPA Filter |
Next Due Date | Interval | System | Subsystem | Maintenance Description |
|---|---|---|---|---|
2020/04/29 | 12 months | VTI Glovebox / ALD | VTI Glovebox | The large antechamber door O-rings should be replaced every year. |
|
| Parts Required |
| Large Antechamber Door O-Ring (2 per door) |
Next Due Date | Interval | System | Subsystem | Maintenance Description |
|---|---|---|---|---|
2020/04/29 | 12 months | VTI Glovebox / ALD | VTI Glovebox | The small antechamber door O-rings should be replaced every year. |
|
| Parts Required |
| Small Antechamber Door O-Ring (2 per door) |
EBARA EV-A10-P Pump Maintenance Schedule
Next Due Date | Interval | System | Subsystem | Maintenance Description |
|---|---|---|---|---|
2019/07/01 | 1 week | LC Glovebox / ALD | (3) EBARA EV-A10-P Pump | Check for Alarm Signal on Pump |
Next Due Date | Interval | System | Subsystem | Maintenance Description |
|---|---|---|---|---|
2019/07/10 | 1 month | LC Glovebox / ALD | (3) EBARA EV-A10-P Pump | Check Oil level |
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| Parts Required | C-0402-000-0111 | BARRIERRTA J100ES Lubricant oil |