Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

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Protemp Horizontal Furnace - Tube 01 - RCA Clean Oxidation

iLab Name: C - Tube 01 Clean Ox
iLab Kiosk: BRK Furnace Core
FIC: Shared
Owner: Rich Hosler
Location: Cleanroom - R Bay
Maximum Wafer Size: 6"/150 mm

Overview

General Description

Horizontal furnaces for a variety of processes.

Specifications

Process Capabilities:

Tube 01 - Wet / Dry Oxidation (Super-Clean Si users only)

Process Temperatures:

Tube 01 - 1100°C maximum

All furnace tubes are capable of samples up to 6 inches in diameter.

Standard Operating Procedure

- Thermal Oxidation

Birck Nanotechnology Center Wiki

Tube 01 Clean Ox

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