Neaspec NanoFTIR Ultrafast Pump-probe
iLab Name | |
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iLab Kiosk | |
FIC | |
Owner | |
Location | BRK 1045 |
Max. Wafer |
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Info Links |
Overview
General Description
Instrument is used for near-field spectroscopy and microscopy w/ and w/o ultrafast excitation.
Near-field Fourier Transform Infrared with near 20-nm spatial resolution
Near-field Ultrafast Pump-probe nanoFTIR and imaging
Specifications
Numerical specifications of tool performance and abilities, either from manufacturer or those seen in operation. Also include material compatibility and incompatibility.
Technology Overview - Remove if multiple tools use the same technology/process
Description of the science behind the process. Include figures and diagrams if applicable.
Sample Requirements and Preparation
Samples that may be used in the tool, materials that are compatible/incompatible, and the required cleaning before the tool may be used. May include both an "ideal" clean and a minimum required clean. Also include BOE/oxide removal, dehydration, or any recommended post process steps.
Standard Operating Procedure
Standard procedure for tool operation, base off established Birck SOPs.
Process Control Information
Process Control Context
Process Control Charts
Questions & Troubleshooting
Question about tool use or process result?
Answer to question.
Process Library
Create process template for tool, allows a user to fill in the details of their process.
References
Manufacturer brochures, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.